JPS5754946B2 - - Google Patents
Info
- Publication number
- JPS5754946B2 JPS5754946B2 JP47077902A JP7790272A JPS5754946B2 JP S5754946 B2 JPS5754946 B2 JP S5754946B2 JP 47077902 A JP47077902 A JP 47077902A JP 7790272 A JP7790272 A JP 7790272A JP S5754946 B2 JPS5754946 B2 JP S5754946B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/60—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
- H10D84/67—Complementary BJTs
- H10D84/673—Vertical complementary BJTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47077902A JPS5754946B2 (en]) | 1972-08-02 | 1972-08-02 | |
| NLAANVRAGE7310667,A NL179248C (nl) | 1972-08-02 | 1973-08-01 | Werkwijze voor het vervaardigen van een geintegreerde halfgeleiderschakeling met complementaire transistoren. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47077902A JPS5754946B2 (en]) | 1972-08-02 | 1972-08-02 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP557980A Division JPS55102263A (en) | 1980-01-21 | 1980-01-21 | Semiconductor integrated circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4936291A JPS4936291A (en]) | 1974-04-04 |
| JPS5754946B2 true JPS5754946B2 (en]) | 1982-11-20 |
Family
ID=13646991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47077902A Expired JPS5754946B2 (en]) | 1972-08-02 | 1972-08-02 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS5754946B2 (en]) |
| NL (1) | NL179248C (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61119069U (en]) * | 1985-01-12 | 1986-07-26 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5190286A (en]) * | 1975-02-05 | 1976-08-07 | ||
| JPS6223098Y2 (en]) * | 1979-02-06 | 1987-06-12 | ||
| JPS56129338A (en) * | 1980-03-14 | 1981-10-09 | Nec Corp | Semiconductor device |
-
1972
- 1972-08-02 JP JP47077902A patent/JPS5754946B2/ja not_active Expired
-
1973
- 1973-08-01 NL NLAANVRAGE7310667,A patent/NL179248C/xx not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61119069U (en]) * | 1985-01-12 | 1986-07-26 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4936291A (en]) | 1974-04-04 |
| NL179248C (nl) | 1986-08-01 |
| NL7310667A (en]) | 1974-02-05 |
| NL179248B (nl) | 1986-03-03 |